Industrial Products
Semiconductor Lithography
High-performance, ultra-precision imaging technologies for semiconductor device fabrication.
FEATURED PRODUCTS
KrF Scanners/ Steppers
Advanced semiconductor lithography production tools with enhanced lens capabilities and technologies.
FPA-6300ES6a
A sophisticated KrF scanner designed for high volume production, with high overlay accuracy and faster wafer handling.
FPA-6300ESW
The only wide-field KrF scanner in the world that can expose a full-size CMOS image sensor in one shot.
FPA-3030EX6
KrF Stepper for IoT devices using substrates of varying material, sizes and thicknesses.
FEATURED PRODUCTS
i-line Steppers (FEOL)
Cost-effective imaging for a wide range of front-end-of-the-line semiconductor wafer processing applications.
FEATURED PRODUCTS
i-line Steppers (BEOL)
Back-end-of-the-line processing equipment for flexible substrate handling and low resolution.
