≦ 150 nm
resolution
Product
Canon FPA-3030EX6 KrF Stepper
An excimer laser stepper designed for IoT1 and power devices.
22 mm x 22 mm
exposure area
≦ 25 nm (|m| + 3σ)
overlay accuracy
200/150/125/100mm
wafer sizes
High performance KrF excimer laser stepper for IoT devices
Designed for high-productivity manufacture of semiconductors for IoT and power devices, the Canon FPA-3030EX6 is compatible with a variety of special substrates and existing equipment.
Compatible
Handles substrates of various materials, sizes and thicknesses used for IoT & power devices.
Top performance
Delivering the highest levels of resolution, overlay accuracy, and throughput in its class.
Easy integration
Utilise existing facilities thanks to the FPA-3000EX6-compatible reticles and recipes.
Product Specifications
Resolution
≦ 150 nm
Wafer size
200 mm; 150 mm; 125 mm; 100 mm
Overlay accuracy
≤25 nm (|m| + 3σ)
Exposure area
22 mm x 22 mm
Reticle size
6 in. (0.25 in. thick)
Reduction ratio
5:1
Discover the power of a laser stepper designed for IoT devices
Related Products
Canon FPA-6300ES6a
High-productivity KrF scanner that reduces wafer handling and alignment times.
FPA-6300ESW
Wide-field KrF scanner with enhanced lens capabilities.
Prepare your business for the future of semiconductor lithography
1. IoT: Internet of Things
