33 x 42.2 mm
exposure area in one shot
Product
Canon FPA-6300ESW KrF scanner
Wide-field lens for precision across a larger exposure area.
3.125:1
projection magnification
130 nm
image resolution
Upgrade
options to expand production
Full-size CMOS image sensor exposure without stitching
Improve productivity and overlay accuracy with advanced technology. The Canon FPA-6300ESW is the only scanner in the world that can handle a full-size CMOS image sensor without having to stitch multiple exposures.
Fast and reliable
Ultra-efficient output and unrivalled automation increase productivity and save costs.
Proven popularity
Similar to the proven FPA-6300ES6a series to support front-end-of-the-line (FEOL) processes.
Scalable platform
Achieve greater improvements in productivity and accuracy with field upgrade plans.
Product Specifications
Resolution
≤ 130 nm
Wafer size
300 mm
Exposure area
33mm x 42.2mm
Reticle size
6 in.
Overlay accuracy
≤ 9 nm
Numerical Aperture (NA)
0.45 ~ 0.70
Discover how the Canon FPA-6300ESW KrF scanner can boost your business productivity
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