SEMICONDUCTOR LITHOGRAPHY
KrF scanners
Technology for high performance semiconductor lithography.
FPA-6300ESW
The only wide-field KrF scanner in the world that can expose a full-size CMOS image sensor in one shot.
FPA-6300ES6a
A sophisticated KrF scanner designed for high volume production, with high overlay accuracy and faster wafer handling.
FPA-3030EX6
KrF Stepper for IoT devices using substrates of varying material, sizes and thicknesses.
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i-Line steppers
Wide range of FEOL and BEOL applications for semiconductor wafer processing.
